MIL-M-38510/291B
g. At the manufacturer's option, the class B visual inspection is to be performed in accordance with MIL-STD-883, method
2010, condition B, except as follows:
(1) Criteria 3.1.1 and 3.1.2 metallization scratches and voids, the 75 percent of the original metal width over passivation step requirements shall be reduced to 50 percent, and underlying oxide must also be exposed.
(2) Criteria 3.1.7 shall apply to three areas, two opposite corners and one area in the center of sufficient complexity to assure general alignment and contact coverage, and consist only of the area in the immediate field of view.
(3) Criteria 3.3c. Cracks greater than 5 mils are rejected only if they point or cross the scribe grid line. (4) Burn in testing shall be performed at an operating voltage of 7 ±0.5 V, if this option is chosen.
4.3.1 Additional screening for space level product shall be as specified in MIL-PRF-38535.
4.4 Technology Conformance Inspection (TCI). Technology conformance inspection shall be in accordance with MIL-PRF-38535 and as specified herein.
4.4.1 Group A inspection. Group A inspection shall be in accordance with table III of MIL-PRF-38535 and as follows:
a. Tests shall be performed in accordance with table II herein.
b. The following subgroups of table III of MIL-PRF-38535 shall be omitted: (1) Class S devices: Subgroups 5, 6, and 7.
(2) Class B devices: Subgroups 5, 6, and 8.
c. Subgroup 4 (Ci, Co measurements) shall be measured only for initial qualification and after process or design changes which may affect input or output capacitance. Capacitance shall be measured between the designated terminal and VSS at a
frequency of 1 MHz and a signal amplitude not to exceed 50 mV rms. This test shall be performed using a fixed sample size of
25 devices and an acceptance number of zero.
d. Subgroup 12 shall be added to the group A inspection requirements using a sample size series of 15 and shall consist of the procedures, test conditions, and limits specified in table III herein.
4.4.2 Group B inspection. Group B inspection shall be in accordance with table II of MIL-PRF-38535 and as follows:
4.4.3 Group C inspection. Group C inspection shall be in accordance with table IV of MIL-PRF-38535 and as follows:
a. End-point electrical parameters shall be as specified in table II herein.
b. The steady-state life test duration, test condition, and test temperature, or approved alternatives shall be as specified in the device manufacturer's QM plan in accordance with MIL-PRF-38535. The burn-in test circuit shall be maintained under document control by the device manufacturer's Technology Review Board (TRB) in accordance with MIL-PRF-38535 and shall be made available to the acquiring or preparing activity upon request. The test circuit shall specify the inputs, outputs, biases, and power dissipation, as applicable, in accordance with the intent specified in test method 1005 of MIL-STD-883.
c. The devices selected for testing shall be programmed with a minimum of 50 percent of the total number of cells programmed. After completion of all testing, the devices shall be erased and verified (except devices submitted for group D testing).
4.4.4 Group D inspection. Group D inspection shall be in accordance with table V of MIL-PRF-38535. End-point electrical parameters shall be as specified in table II herein.
4.4.5 Group E inspection. Group E inspection is required only for the RHA devices and shall be performed in accordance with MIL- PRF-38535, 4.5.4, and table VI herein.
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